Piezo- and pyroelectric properties of lead scandium tantalate thin films

A. P. De Kroon; S. C. Dunn; R. W. Whatmore

doi:10.1080/10584580108016902

Piezo- and pyroelectric properties of lead scandium tantalate thin films

A. P. De Kroon, S. C. Dunn, R. W. Whatmore

Research output: Contribution to journal › Conference article › peer-review

10 Citations (Scopus)

Abstract

This paper discusses the piezo- and pyroelectric properties of lead scandium tantalate thin films prepared by modified sol-gel technology. Films were deposited on Pt/Ti/SiO₂/Si-substrates at 530-630°C. The quality of the thin films was optimized by design of both the deposition conditions and the solution chemistry. These approaches include spin coating speed, drying plus crystallization temperature and time, drying atmosphere, the use of rapid thermal annealing, PST sol composition, Pb-excess concentration and mixing method. The finished thin films were characterized by optical microscopy, X-ray diffraction, atomic force microscopy, and pyroelectric measurements at 30°C under a DC-bias. Piezo-response AFM was conducted on PST to monitor various piezoelectric responses, which depend on the microstructure of the film. The maximum pyroelectric figure-of-merit F_D was 3.85×10^-5 Pa^-1/2 at 30°C and 1 kHz under a 35 V DC-bias.

Original language	English
Pages (from-to)	209-218
Number of pages	10
Journal	Integrated Ferroelectrics
Volume	35
Issue number	1-4
DOIs	https://doi.org/10.1080/10584580108016902
Publication status	Published - 15 Aug 2000
Externally published	Yes
Event	12th Interntional Symposium on Integrated Ferroelectrics - Aachen, Germany Duration: 12 Mar 2000 → 15 Mar 2000

Keywords

Chemical solution deposition
Lead scandium tantalate
Piezo-response AFM
PST
Pyroelectric properties
Taguchi

Access to Document

10.1080/10584580108016902

Cite this

@article{0b24f4f8abaf4624a387c1615f19494f,

title = "Piezo- and pyroelectric properties of lead scandium tantalate thin films",

abstract = "This paper discusses the piezo- and pyroelectric properties of lead scandium tantalate thin films prepared by modified sol-gel technology. Films were deposited on Pt/Ti/SiO2/Si-substrates at 530-630°C. The quality of the thin films was optimized by design of both the deposition conditions and the solution chemistry. These approaches include spin coating speed, drying plus crystallization temperature and time, drying atmosphere, the use of rapid thermal annealing, PST sol composition, Pb-excess concentration and mixing method. The finished thin films were characterized by optical microscopy, X-ray diffraction, atomic force microscopy, and pyroelectric measurements at 30°C under a DC-bias. Piezo-response AFM was conducted on PST to monitor various piezoelectric responses, which depend on the microstructure of the film. The maximum pyroelectric figure-of-merit FD was 3.85×10-5 Pa-1/2 at 30°C and 1 kHz under a 35 V DC-bias.",

keywords = "Chemical solution deposition, Lead scandium tantalate, Piezo-response AFM, PST, Pyroelectric properties, Taguchi",

author = "{De Kroon}, {A. P.} and Dunn, {S. C.} and Whatmore, {R. W.}",

year = "2000",

month = aug,

day = "15",

doi = "10.1080/10584580108016902",

language = "English",

volume = "35",

pages = "209--218",

number = "1-4",

note = "12th Interntional Symposium on Integrated Ferroelectrics ; Conference date: 12-03-2000 Through 15-03-2000",

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TY - JOUR

T1 - Piezo- and pyroelectric properties of lead scandium tantalate thin films

AU - De Kroon, A. P.

AU - Dunn, S. C.

AU - Whatmore, R. W.

PY - 2000/8/15

Y1 - 2000/8/15

N2 - This paper discusses the piezo- and pyroelectric properties of lead scandium tantalate thin films prepared by modified sol-gel technology. Films were deposited on Pt/Ti/SiO2/Si-substrates at 530-630°C. The quality of the thin films was optimized by design of both the deposition conditions and the solution chemistry. These approaches include spin coating speed, drying plus crystallization temperature and time, drying atmosphere, the use of rapid thermal annealing, PST sol composition, Pb-excess concentration and mixing method. The finished thin films were characterized by optical microscopy, X-ray diffraction, atomic force microscopy, and pyroelectric measurements at 30°C under a DC-bias. Piezo-response AFM was conducted on PST to monitor various piezoelectric responses, which depend on the microstructure of the film. The maximum pyroelectric figure-of-merit FD was 3.85×10-5 Pa-1/2 at 30°C and 1 kHz under a 35 V DC-bias.

AB - This paper discusses the piezo- and pyroelectric properties of lead scandium tantalate thin films prepared by modified sol-gel technology. Films were deposited on Pt/Ti/SiO2/Si-substrates at 530-630°C. The quality of the thin films was optimized by design of both the deposition conditions and the solution chemistry. These approaches include spin coating speed, drying plus crystallization temperature and time, drying atmosphere, the use of rapid thermal annealing, PST sol composition, Pb-excess concentration and mixing method. The finished thin films were characterized by optical microscopy, X-ray diffraction, atomic force microscopy, and pyroelectric measurements at 30°C under a DC-bias. Piezo-response AFM was conducted on PST to monitor various piezoelectric responses, which depend on the microstructure of the film. The maximum pyroelectric figure-of-merit FD was 3.85×10-5 Pa-1/2 at 30°C and 1 kHz under a 35 V DC-bias.

KW - Chemical solution deposition

KW - Lead scandium tantalate

KW - Piezo-response AFM

KW - PST

KW - Pyroelectric properties

KW - Taguchi

U2 - 10.1080/10584580108016902

DO - 10.1080/10584580108016902

M3 - Conference article

AN - SCOPUS:0035041859

SN - 1058-4587

VL - 35

SP - 209

EP - 218

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

T2 - 12th Interntional Symposium on Integrated Ferroelectrics

Y2 - 12 March 2000 through 15 March 2000

ER -