Strain behavior of thin film PbZr0.3Ti0.7O 3 (30/70) examined through piezoforce microscopy

S. Dunn

doi:10.1063/1.1611635

Strain behavior of thin film PbZr_0.3Ti_0.7O ₃ (30/70) examined through piezoforce microscopy

S. Dunn

Cranfield University

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

The piezoelectric response of sol-gel thin film lead zirconate titanate (PZT 30/70, PbZr_0.3Ti_0.7O₃) on Pt-Ti/SiO ₂/Si to a quasi-dc electric field was investigated. The atomic force microscope (AFM), modified to perform piezo-AFM was used for the purpose. The strain field or butterfly loops for the PZT film were generated by applying a sinusoidal 2 Hz ac waveform between the AFM cantilever and ground.

Original language	English
Pages (from-to)	5964-5968
Number of pages	5
Journal	Journal of Applied Physics
Volume	94
Issue number	9
DOIs	https://doi.org/10.1063/1.1611635
Publication status	Published - 1 Nov 2003
Externally published	Yes

Access to Document

10.1063/1.1611635

Cite this

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title = "Strain behavior of thin film PbZr0.3Ti0.7O 3 (30/70) examined through piezoforce microscopy",

abstract = "The piezoelectric response of sol-gel thin film lead zirconate titanate (PZT 30/70, PbZr0.3Ti0.7O3) on Pt-Ti/SiO 2/Si to a quasi-dc electric field was investigated. The atomic force microscope (AFM), modified to perform piezo-AFM was used for the purpose. The strain field or butterfly loops for the PZT film were generated by applying a sinusoidal 2 Hz ac waveform between the AFM cantilever and ground.",

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N2 - The piezoelectric response of sol-gel thin film lead zirconate titanate (PZT 30/70, PbZr0.3Ti0.7O3) on Pt-Ti/SiO 2/Si to a quasi-dc electric field was investigated. The atomic force microscope (AFM), modified to perform piezo-AFM was used for the purpose. The strain field or butterfly loops for the PZT film were generated by applying a sinusoidal 2 Hz ac waveform between the AFM cantilever and ground.

AB - The piezoelectric response of sol-gel thin film lead zirconate titanate (PZT 30/70, PbZr0.3Ti0.7O3) on Pt-Ti/SiO 2/Si to a quasi-dc electric field was investigated. The atomic force microscope (AFM), modified to perform piezo-AFM was used for the purpose. The strain field or butterfly loops for the PZT film were generated by applying a sinusoidal 2 Hz ac waveform between the AFM cantilever and ground.

U2 - 10.1063/1.1611635

DO - 10.1063/1.1611635

M3 - Article

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