@inproceedings{97725617892d49ad9426c830ef22ce52,
title = "The measurement of ferroelectric thin films using piezo force microscopy",
abstract = "The use of Atomic Force Microscopy to evaluate the properties of ferroelectric thin films is often associated with poor contrast images and quantitative analysis is often not possible. In this paper elements of the metrology associated with this technique are explored, and results comparing different materials types and surface cleanliness are described.",
keywords = "AFM, Characterisation, Ferroelectric, Piezo force microscopy, Thin films",
author = "Cain, {M. G.} and S. Dunn and P. Jones",
year = "2004",
month = mar,
day = "7",
language = "English",
isbn = "0972842276",
series = "2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004",
pages = "362--365",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004",
note = "2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 ; Conference date: 07-03-2004 Through 11-03-2004",
}