The measurement of ferroelectric thin films using piezo force microscopy

M. G. Cain, S. Dunn, P. Jones

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

The use of Atomic Force Microscopy to evaluate the properties of ferroelectric thin films is often associated with poor contrast images and quantitative analysis is often not possible. In this paper elements of the metrology associated with this technique are explored, and results comparing different materials types and surface cleanliness are described.

Original languageEnglish
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
EditorsM. Laudon, B. Romanowicz
Pages362-365
Number of pages4
Publication statusPublished - 7 Mar 2004
Externally publishedYes
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: 7 Mar 200411 Mar 2004

Publication series

Name2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume3

Conference

Conference2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Country/TerritoryUnited States
CityBoston, MA
Period7/03/0411/03/04

Keywords

  • AFM
  • Characterisation
  • Ferroelectric
  • Piezo force microscopy
  • Thin films

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